Paraschiv, VasileVasileParaschivBoullart, WernerWernerBoullartVanhaelemeersch, SergeSergeVanhaelemeerschWouters, DirkDirkWoutersVecchio, EmmaEmmaVecchioFragala, Maria-ElenaMaria-ElenaFragalaVan Autryve, LucLucVan AutryveMonchoix, HervéHervéMonchoixCasella, PatriziaPatriziaCasellaZambrano, RaffaeleRaffaeleZambrano2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7974SrBi2Ta2O2 Patterning for feram applications: a dry -wet approachOral presentation