In depth analysis of 3D NAND enablers in gate stack integration and demonstration in 3D devices

Tan, Chi LimChi LimTanLavizzari, SimoneSimoneLavizzariBlomme, PieterPieterBlommeBreuil, LaurentLaurentBreuilVecchio, EmmaEmmaVecchioSebaai, FaridFaridSebaaiParaschiv, VasileVasileParaschivTao, ZhengZhengTaoSchepers, BartBartSchepersNyns, LauraLauraNynsPeter, AntonyAntonyPeterDekkers, HaroldHaroldDekkersOng, PatrickPatrickOngTsvetanova, DianaDianaTsvetanovaDevriendt, KatiaKatiaDevriendtTeugels, LieveLieveTeugelsHeylen, NancyNancyHeylenRaymaekers, TomTomRaymaekersJossart, NicoNicoJossartMennella, PasqualePasqualeMennellaDelhougne, RomainRomainDelhougneVadakupudhu Palayam, SenthilSenthilVadakupudhu PalayamArreghini, AntonioAntonioArreghiniVan den Bosch, GeertGeertVan den BoschFurnemont, ArnaudArnaudFurnemont2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29550In depth analysis of 3D NAND enablers in gate stack integration and demonstration in 3D devicesProceedings paperhttp://ieeexplore.ieee.org/document/7939090/