Two-level Semi-damascene interconnect with fully self-aligned Vias at MP18

Marti, GiulioGiulioMartiPokhrel, AnkitAnkitPokhrelMurdoch, GayleGayleMurdochDelie, GillesGillesDelieGupta, AnshulAnshulGuptaMarien, PhilippePhilippeMarienLesniewska, AlicjaAlicjaLesniewskaDecoster, StefanStefanDecosterKundu, SouvikSouvikKunduLe, Quoc ToanQuoc ToanLeOniki, YusukeYusukeOnikiKenens, BartBartKenensHermans, YannickYannickHermansPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2024-05-072023-08-072024-05-0720232380-632XWOS:001027381700011https://imec-publications.be/handle/20.500.12860/42290Two-level Semi-damascene interconnect with fully self-aligned Vias at MP18Proceedings paper10.1109/IITC/MAM57687.2023.10154682979-8-3503-1097-9WOS:001027381700011