Kerber, AndreasAndreasKerberCartier, EduardEduardCartierDegraeve, RobinRobinDegraeveRoussel, PhilippePhilippeRousselPantisano, LuigiLuigiPantisanoKauerauf, ThomasThomasKaueraufGroeseneken, GuidoGuidoGroesenekenDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7726Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integrationProceedings paper