Inorganic material profiling using Arn + cluster: Can we achieve high Quality profiles?

Conard, ThierryThierryConardFleischmann, ClaudiaClaudiaFleischmannHavelund, R.R.HavelundFranquet, AlexisAlexisFranquetPoleunis, ClaudeClaudePoleunisDelcorte, AranaudAranaudDelcorteVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22165Inorganic material profiling using Arn + cluster: Can we achieve high Quality profiles?Meeting abstract