Minimizing the size of force-controlled point contacts on silicon for carrier profiling

Snauwaert, JohanJohanSnauwaertBlanc, N.N.BlancDe Wolf, PeterPeterDe WolfVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.Hellemans2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1502Minimizing the size of force-controlled point contacts on silicon for carrier profilingJournal article