Loo, RogerRogerLooCollaert, NadineNadineCollaertVerheyen, PeterPeterVerheyenCaymax, MattyMattyCaymaxDelhougne, RomainRomainDelhougneDe Meyer, KristinKristinDe Meyer2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9221Fabrication of 50nm high performance strained-SiGe pMOSFETs with selective epitaxial growthJournal article