Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling

Romanyuk, B. N.B. N.RomanyukLitovchenko, V. G.V. G.LitovchenkoEfremov, A. A.A. A.EfremovMel'nik, V. P.V. P.Mel'nikClaeys, C.C.Claeys2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2911Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modellingOral presentation