A study of breakdown mechanisms in electrostatic actuators using mechanical response under EOS-ESD stress

Sangameswaran, SandeepSandeepSangameswaranDe Coster, JeroenJeroenDe CosterScholz, MirkoMirkoScholzLinten, DimitriDimitriLintenThijs, StevenStevenThijsVan Hoof, ChrisChrisVan HoofDe Wolf, IngridIngridDe WolfGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16154A study of breakdown mechanisms in electrostatic actuators using mechanical response under EOS-ESD stressProceedings paper