Borzi, RaffaellaRaffaellaBorziFedders, P. A.P. A.FeddersChan, P. H.P. H.ChanHerberg, J.J.HerbergLeopold, D. J.D. J.LeopoldNorberg, R. E.R. E.Norberg2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6059Interstitial molecular hydrogen and deuterium in PECVD and HW amorphous siliconJournal article