Libezny, MilanMilanLibeznyKaniava, ArvydasArvydasKaniavaKissinger, G.G.KissingerNijs, JohanJohanNijsClaeys, CorCorClaeysVanhellemont, JanJanVanhellemont2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/724PL study of oxygen related defects in siliconProceedings paper