Nagar, MagiMagiNagarVereecken, PhilippePhilippeVereeckenRadisic, AlexAlexRadisicStrubbe, KatrienKatrienStrubbe2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17680Tailoring copper island density for copper plating on a RuTa substrateProceedings paper