Roelkens, GuntherGuntherRoelkensLiu, LiuLiuLiuBrouckaert, JoostJoostBrouckaertVan Campenhout, J.J.Van CampenhoutVan Laere, FrederikFrederikVan LaereVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-172021-10-172008-06https://imec-publications.be/handle/20.500.12860/14373Wafer bonding and heterogeneous integration: III-V/silicon photonicsProceedings paper