Kauerauf, ThomasThomasKaueraufDegraeve, RobinRobinDegraeveCrupi, FeliceFeliceCrupiKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaes2021-10-162021-10-162005-04https://imec-publications.be/handle/20.500.12860/10680Trap generation and progressive wearout in thin HfSiONProceedings paper