Experimental and theoretical study on the effect of methane concentration on the properties of heavily boron-doped single crystal diamond layers

Rouzbahani Bayatani, RozitaRozitaRouzbahani BayataniNicley, ShannonShannonNicleyLloret, FernandoFernandoLloretPobedinskas, PauliusPauliusPobedinskasVanpoucke, DannyDannyVanpouckeAraujo, D.D.AraujoHaenen, KenKenHaenen2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33913Experimental and theoretical study on the effect of methane concentration on the properties of heavily boron-doped single crystal diamond layersOral presentation