Use of multifunctional carboxylic acids and hydrogen peroxide to improve surface quality and minimize phosphine evolution during chemical mechanical polishing of indium phosphide surfaces

Matovu, John BogereJohn BogereMatovuOng, PatrickPatrickOngKrishnan, SitaramanSitaramanKrishnanBabu, S.V.S.V.BabuLeunissen, PeterPeterLeunissen2021-10-212021-10-2120130888-5885https://imec-publications.be/handle/20.500.12860/22787Use of multifunctional carboxylic acids and hydrogen peroxide to improve surface quality and minimize phosphine evolution during chemical mechanical polishing of indium phosphide surfacesJournal article