First-principles investigation of thickness-dependent electrical resistivity for low-dimensional interconnects

Van Troeye, BenoitBenoitVan TroeyeSankaran, KiroubanandKiroubanandSankaranTokei, ZsoltZsoltTokeiAdelmann, ChristophChristophAdelmannPourtois, GeoffreyGeoffreyPourtois2024-03-112023-10-242024-03-1120232469-9950WOS:001075547900001https://imec-publications.be/handle/20.500.12860/42955First-principles investigation of thickness-dependent electrical resistivity for low-dimensional interconnectsJournal article10.1103/PhysRevB.108.125117WOS:001075547900001FILMSCONDUCTIVITYMETALS