New understanding of dielectric breakdown in advanced FinFET devices – physical, electrical, statistical and multiphysics study

Mei, SSMeiBosman, M.M.BosmanRaghavan, N.N.RaghavanLinten, DimitriDimitriLintenGroeseneken, GuidoGuidoGroesenekenHoriguchi, NaotoNaotoHoriguchiPey, K.L.K.L.Pey2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26987New understanding of dielectric breakdown in advanced FinFET devices – physical, electrical, statistical and multiphysics studyProceedings paper