Experimental study of programming saturation in low-coupling planar high-k/metal gate Nand flash memory cells using a dedicated test structure

Blomme, PieterPieterBlommeTan, Chi LimChi LimTanSouriau, LaurentLaurentSouriauVersluijs, JankoJankoVersluijsVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23559Experimental study of programming saturation in low-coupling planar high-k/metal gate Nand flash memory cells using a dedicated test structureProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6849365&contentType=Conference+Publications