Plasma treatments of a low-k dielectric polymer surface

Martin Hoyas, AnaAnaMartin HoyasSchuhmacher, JörgJörgSchuhmacherWhelan, CarolineCarolineWhelanSchaekers, MarcMarcSchaekersCelis, Jean-PierreJean-PierreCelisMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7877Plasma treatments of a low-k dielectric polymer surfaceMeeting abstract