MuGFET processing challenges and demonstration of a 45 nm node 6T-SRAM cell

Parton, ElsElsPartonBiesemans, SergeSergeBiesemans2021-10-162021-10-162005-07https://imec-publications.be/handle/20.500.12860/10987MuGFET processing challenges and demonstration of a 45 nm node 6T-SRAM cellJournal article