Light-assisted investigation of the role of oxygen flow during IGZO deposition on deep subgap states and their evolution under PBTI

Rinaudo, PietroPietroRinaudoVaisman Chasin, AdrianAdrianVaisman ChasinZhao, YingYingZhaoKaczer, BenBenKaczerRassoul, NouredineNouredineRassoulDekkers, HaroldHaroldDekkersvan Setten, MichielMichielvan SettenBelmonte, AttilioAttilioBelmonteDe Wolf, IngridIngridDe WolfKar, Gouri SankarGouri SankarKarFranco, JacopoJacopoFranco2024-09-192024-08-162024-09-192024979-8-3503-6977-91541-7026WOS:001229691100109https://imec-publications.be/handle/20.500.12860/44314Light-assisted investigation of the role of oxygen flow during IGZO deposition on deep subgap states and their evolution under PBTIProceedings paper10.1109/IRPS48228.2024.10529432979-8-3503-6976-2WOS:001229691100109