Ultra-narrow, high aspect ratio trenches for use in miniaturized poly-SiGe accelerometers

Ray Chaudhuri, AsheshAsheshRay ChaudhuriHelin, PhilippePhilippeHelinSeveri, SimoneSimoneSeveriVan Hoof, RitaRitaVan HoofDu Bois, BertBertDu BoisTilmans, HarrieHarrieTilmansFrancis, LaurentLaurentFrancisWitvrouw, AnnAnnWitvrouw2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22984Ultra-narrow, high aspect ratio trenches for use in miniaturized poly-SiGe accelerometersMeeting abstract