Bombardment induced charging and electrical properties of ion beam synthesised silicon oxides

Beyer, GeraldGeraldBeyerVandervorst, WilfriedWilfriedVandervorstKilner, J. A.J. A.KilnerWittmaack, K.K.Wittmaack2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1732Bombardment induced charging and electrical properties of ion beam synthesised silicon oxidesProceedings paper