A new characterization method for electrostatically actuated resonant MEMS: determination of the mechanical resonance frequency, quality factor and dielectric charging

Kalicinski, StanislawStanislawKalicinskiTilmans, HarrieHarrieTilmansWevers, MartineMartineWeversDe Wolf, IngridIngridDe Wolf2021-10-172021-10-1720090924-4247https://imec-publications.be/handle/20.500.12860/15567A new characterization method for electrostatically actuated resonant MEMS: determination of the mechanical resonance frequency, quality factor and dielectric chargingJournal article