NEXAFS characterization of inorganic and organic materials for semiconductor application

Fleischmann, ClaudiaClaudiaFleischmannHoenicke, PhilippPhilippHoenickeHermann, PeterPeterHermannMueller, MatthiasMatthiasMuellerBeckhoff, BurkhardBurkhardBeckhoffVoroshazi, EszterEszterVoroshaziConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23822NEXAFS characterization of inorganic and organic materials for semiconductor applicationMeeting abstract