Leunissen, PeterPeterLeunissenPatsis, G.P.G.P.PatsisVan Steenwinckel, DavidDavidVan SteenwinckelLammers, JeroenJeroenLammers2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10775Investigation of statistical Fluctuations on line edge rougnessOral presentation