Houssa, MichelMichelHoussaNaili, MohamedMohamedNailiHeyns, MarcMarcHeynsStesmans, AndreAndreStesmans2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4437Charge trapping in SiOx/ZrO2 gate dielectric stacksProceedings paper