Studying local aluminum back surface fields (AL-BSF) contacts through scanning spreading resistance microscopy (SSRM)

Uruena De Castro, AngelAngelUruena De CastroJohn, JoachimJoachimJohnEyben, PierrePierreEybenVanhaeren, DanielleDanielleVanhaerenWerner, ThiloThiloWernerHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorstPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19930Studying local aluminum back surface fields (AL-BSF) contacts through scanning spreading resistance microscopy (SSRM)Proceedings paper