Vos, RitaRitaVosRolin, CedricCedricRolinRip, JensJensRipConard, ThierryThierryConardSteylaerts, TimTimSteylaertsVidal Cabanilles, MariaMariaVidal CabanillesLevrie, KarenKarenLevrieJans, KarolienKarolienJansStakenborg, TimTimStakenborg2021-10-262021-10-2620180743-7463https://imec-publications.be/handle/20.500.12860/32225Chemical vapor deposition of azidoalkylsilane monolayer filmsJournal articlehttps://pubs.acs.org/doi/abs/10.1021/acs.langmuir.7b04011