Mitard, JeromeJeromeMitardKocak, Husnu MuratHusnu MuratKocakChiarella, ThomasThomasChiarellaSheng, CassieCassieShengDemuynck, StevenStevenDemuynckHoriguchi, NaotoNaotoHoriguchi2026-03-162026-03-162025979-8-3315-3170-61071-9032https://imec-publications.be/handle/20.500.12860/58845This work introduces a novel Convolutional Neural Network for classifying transfer characteristics in emerging Gate-All-Around MOSFET. Trained on vast experimental dataset, the algorithm successfully identifies distinct failure modes across wafers with complex processing variations. The automated analysis enables faster yield enhancement and process optimization for next-generation 3D MOSFET technologies.engProceedings paper10.1109/icmts63811.2025.11068926WOS:001546500500026