Minority carrier lifetime evolution at heat treatments or hydrogenation of silicon substrates

Ulyashin, A.A.UlyashinBilyalov, RenatRenatBilyalovDekkers, HaroldHaroldDekkersDe Wolf, StefaanStefaanDe WolfVan Nieuwenhuysen, KrisKrisVan NieuwenhuysenCarnel, LodewijkLodewijkCarnelBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmans2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9698Minority carrier lifetime evolution at heat treatments or hydrogenation of silicon substratesProceedings paper