Texture control for Cu hybrid bonding pads using a PVD Cu process

De Messemaeker, JokeJokeDe MessemaekerJourdan, NicolasNicolasJourdanNolmans, PhilipPhilipNolmansKim, Soon-WookSoon-WookKimBeyer, GeraldGeraldBeyer2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32810Texture control for Cu hybrid bonding pads using a PVD Cu processProceedings paper