Material issues of SiGe and Ge CMOS technologies

Claeys, CorCorClaeysLoo, RogerRogerLooMeuris, MarcMarcMeurisSimoen, EddyEddySimoen2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11876Material issues of SiGe and Ge CMOS technologiesOral presentation