Trager-Cowan, C.C.Trager-CowanMiddleton, P. J.P. J.MiddletonMohammed, A.A.MohammedManson-Smith, S. K.S. K.Manson-SmithO'Donnell, K. P.K. P.O'DonnellVan der Stricht, WimWimVan der StrichtMoerman, IngridIngridMoermanDemeester, PietPietDemeester2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3883Probing the properties of nitride thin films in 3-dimensions using a variable energy beamOral presentation