Phase evolution of sol-gel prepared Pb(Zr0.3Ti0.7)O3 thin films deposited on IrO2/TiO2/SiO2/Si electrodes

Van Genechten, DirkDirkVan GenechtenVanhoyland, G.G.VanhoylandD'Haen, JanJanD'HaenJohnson, JoJoJohnsonWouters, DirkDirkWoutersVan Bael, MarliesMarliesVan BaelVan den Rul, HeidiHeidiVan den RulMullens, J.J.MullensVan Poucke, L.L.Van Poucke2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9748Phase evolution of sol-gel prepared Pb(Zr0.3Ti0.7)O3 thin films deposited on IrO2/TiO2/SiO2/Si electrodesJournal article