Lee, Jae WooJae WooLeeJang, DoyoungDoyoungJangMouis, MireilleMireilleMouisKim, Gyu TaeGyu TaeKimChiarella, ThomasThomasChiarellaHoffmann, Thomas Y.Thomas Y.HoffmannGhibaudo, GérardGérardGhibaudo2021-10-192021-10-1920110038-1101https://imec-publications.be/handle/20.500.12860/19268Mobility analysis of surface roughness scattering in FinFET devicesJournal article