Pawlak, BartekBartekPawlakVandervorst, WilfriedWilfriedVandervorstLindsay, RichardRichardLindsayDe Wolf, IngridIngridDe WolfRoozeboom, F.F.RoozeboomDelhougne, RomainRomainDelhougneBenedetti, AlessandroAlessandroBenedettiLoo, RogerRogerLooCaymax, MattyMattyCaymaxMaex, KarenKarenMaexCowern, N.E.B.N.E.B.Cowern2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9412The role of preamorphization and activation for ultra shallow junction formation on strained Si layers grown on SiGe bufferProceedings paper