Bencher, ChrisChrisBencherDai, HuixiongHuixiongDaiMiao, LiyanLiyanMiaoChen, YongmeiYongmeiChenXu, PingPingXuChen, YijianYijianChenOemardani, ShianyShianyOemardaniSweis, JasonJasonSweisWiaux, VincentVincentWiauxHermans, JanJanHermansChang, Li-WenLi-WenChangBao, XinyuXinyuBaoYi, HeHeYiWong, H.-S. PhilippeH.-S. PhilippeWong2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18548Mandrel-based patterning: density multiplication techniques for15nm nodesProceedings paper