Zyulkov, IvanIvanZyulkovHikavyy, AndriyAndriyHikavyy2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24901Strained SiGe layers growth with digermane/disilane recursors combinationMeeting abstracthttp://www.igc.irk.ru/ConfSi-2014/Tezis/Abstracts_of_the_Conference_Silicon-2014.pdf