Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves

Rudra, SukumarSukumarRudraDe Coster, JeroenJeroenDe CosterVan Hoof, RitaRitaVan HoofBryce, GeorgeGeorgeBryceSeveri, SimoneSimoneSeveriWitvrouw, AnnAnnWitvrouwVan Thourhout, DriesDriesVan Thourhout2021-10-202021-10-2020120924-4247https://imec-publications.be/handle/20.500.12860/21434Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valvesJournal articlehttp://dx.doi.org/10.1016/j.sna.2012.03.034