LENS (Lithography Enhancement towards Nano Scale) a european project to support double exposure and double patterning technology development

Cantu, PietroPietroCantuBaldi, LivioLivioBaldiPiacentini, PaoloPaoloPiacentiniSytsma, JoostJoostSytsmaLe Gratiet, BernardBernardLe GratietGaugiran, StephanieStephanieGaugiranWong, PatrickPatrickWongMiyashita, HiroyukiHiroyukiMiyashitaAtzei, Luisa RitaLuisa RitaAtzeiBuch, XavierXavierBuchVerkleij, DickDickVerkleijToublan, OlivierOlivierToublanPerez-Murano, FrancescoFrancescoPerez-MuranoMecerreyes, DavidDavidMecerreyes2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16822LENS (Lithography Enhancement towards Nano Scale) a european project to support double exposure and double patterning technology developmentProceedings paper