In-situ study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Low-k damascene interconnects using synchrotron radiation

Wilson, ChrisChrisWilsonVolders, HennyHennyVoldersTokei, ZsoltZsoltTokeiCroes, KristofKristofCroesPantouvaki, MariannaMariannaPantouvakiBeyer, GeraldGeraldBeyerHorsfall, Alton B.Alton B.HorsfallO'Neill, Anthony G.Anthony G.O'Neill2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16548In-situ study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Low-k damascene interconnects using synchrotron radiationMeeting abstract