An analytic Volterra-series-based model for a MEMS variable capacitor

Innocent, ManuelManuelInnocentWambacq, PietPietWambacqDonnay, StephaneStephaneDonnayTilmans, HarrieHarrieTilmansSansen, WillyWillySansenDe Man, HugoHugoDe Man2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7682An analytic Volterra-series-based model for a MEMS variable capacitorJournal article