The unique properties of SiCN as bonding material for hybrid bonding

Iacovo, SerenaSerenaIacovoKim, Soon-WookSoon-WookKimNagano, FuyaFuyaNaganoPeng, LanLanPengInoue, FumihiroFumihiroInouePhommahaxay, AlainAlainPhommahaxayBeyne, EricEricBeyne2023-01-202022-09-242023-01-202021naWOS:000853032600038https://imec-publications.be/handle/20.500.12860/40495The unique properties of SiCN as bonding material for hybrid bondingProceedings paper10.1109/LTB-3D53950.2021.9598192978-1-6654-0567-6WOS:000853032600038