Xu, KaidongKaidongXuVereecke, GuyGuyVereeckeKesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeLux, MarcelMarcelLuxHenry, Sally-AnnSally-AnnHenryKraus, HaraldHaraldKrausArcher, L.L.ArcherMertens, PaulPaulMertensKovacs, FFKovacsDalmer, MMDalmerGaulhofer, EEGaulhoferLuo, S.J.S.J.LuoHan, Q.Y.Q.Y.HanBerry, I.I.Berry2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13240Modifications of porous low-k by plasma treatments and wet cleansProceedings paper