Houssa, MichelMichelHoussaDegraeve, RobinRobinDegraevePomarede, C.C.Pomaredevan Dijk, KittyKittyvan DijkWerkhoven, ChrisChrisWerkhovenMertens, PaulPaulMertensHeyns, MarcMarcHeynsStesmans, AndreAndreStesmans2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3520Electrical properties and reliability of ultrathin remote plasma enhanced CVD Si3N4 layersOral presentation