Li, YunlongYunlongLiCivale, YannYannCivaleOba, YoshiyukiYoshiyukiObaCockburn, AndrewAndrewCockburnPark, Jin HeeJin HeeParkBeyne, EricEricBeyneDe Wolf, IngridIngridDe WolfCroes, KristofKristofCroes2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22692Impact of barrier integrity on liner reliability in 3D through silicon viasProceedings paper