Electrical evolution of undoped diamond seed particles during B-doped diamond growth and their impact on diamond film conductivity

Tsigkourakos, MenelaosMenelaosTsigkourakosHantschel, ThomasThomasHantschelNuytten, ThomasThomasNuyttenVerhulst, AnneAnneVerhulstDouhard, BastienBastienDouhardVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24635Electrical evolution of undoped diamond seed particles during B-doped diamond growth and their impact on diamond film conductivityMeeting abstract