Duhayon, NatasjaNatasjaDuhayonEyben, PierrePierreEybenFouchier, MarcMarcFouchierClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstAlvarez, DavidDavidAlvarezSchoemann, S.S.SchoemannCiappa, M.M.CiappaStangoni, M.M.StangoniFichtner, W.W.FichtnerFormanek, P.P.FormanekRaineri, V.V.RaineriGiannazzo, F.F.GiannazzoGoghero, D.D.GogheroRosenwaks, Y.Y.RosenwaksShikler, R.R.ShiklerSaraf, S.S.SarafSadewasser, S.S.SadewasserBarreau, N.N.BarreauGlatzel, T.T.GlatzelVerheijen, M.M.VerheijenMentink, S.A.M.S.A.M.Mentinkvon Sprekelsen, M.M.von SprekelsenMaltezopoulos, T.T.MaltezopoulosWiesendanger, R.R.WiesendangerHellemans, L.L.Hellemans2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7535Assessing the performance of two-dimensional dopant profiling techniquesProceedings paper